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High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing
We report a miniature dual-resonance photoacoustic (PA) sensor, mainly consisting of a small resonant T-type PA cell and an integrated sensor probe based on a silicon cantilever beam. The resonance frequency of the miniature T-type PA cell is matched with the first-order natural frequency of the can...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Elsevier
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9441259/ https://www.ncbi.nlm.nih.gov/pubmed/36068800 http://dx.doi.org/10.1016/j.pacs.2022.100386 |
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author | Wu, Guojie Gong, Zhenfeng Ma, Junsheng Li, Haie Guo, Min Chen, Ke Peng, Wei Yu, Qingxu Mei, Liang |
author_facet | Wu, Guojie Gong, Zhenfeng Ma, Junsheng Li, Haie Guo, Min Chen, Ke Peng, Wei Yu, Qingxu Mei, Liang |
author_sort | Wu, Guojie |
collection | PubMed |
description | We report a miniature dual-resonance photoacoustic (PA) sensor, mainly consisting of a small resonant T-type PA cell and an integrated sensor probe based on a silicon cantilever beam. The resonance frequency of the miniature T-type PA cell is matched with the first-order natural frequency of the cantilever beam to achieve double resonance of the acoustic signal. The volume of the designed T-type PA cell is only about 2.26 cubic centimeters. A PA spectroscopy (PAS) system, employing the dual-resonance photoacoustic (PA) sensor as the prober and a high-speed spectrometer as the demodulator, has been implemented for high-sensitivity methane sensing. The sensitivity and the minimum detection limit can reach up to 2.0 pm/ppm and 35.6 parts-per-billion, respectively, with an averaging time of 100 s. The promising performance demonstrated a great potential of employing the reported sensor for high-sensitivity gas sensing in sub cubic centimeter-level spaces. |
format | Online Article Text |
id | pubmed-9441259 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | Elsevier |
record_format | MEDLINE/PubMed |
spelling | pubmed-94412592022-09-05 High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing Wu, Guojie Gong, Zhenfeng Ma, Junsheng Li, Haie Guo, Min Chen, Ke Peng, Wei Yu, Qingxu Mei, Liang Photoacoustics Research Article We report a miniature dual-resonance photoacoustic (PA) sensor, mainly consisting of a small resonant T-type PA cell and an integrated sensor probe based on a silicon cantilever beam. The resonance frequency of the miniature T-type PA cell is matched with the first-order natural frequency of the cantilever beam to achieve double resonance of the acoustic signal. The volume of the designed T-type PA cell is only about 2.26 cubic centimeters. A PA spectroscopy (PAS) system, employing the dual-resonance photoacoustic (PA) sensor as the prober and a high-speed spectrometer as the demodulator, has been implemented for high-sensitivity methane sensing. The sensitivity and the minimum detection limit can reach up to 2.0 pm/ppm and 35.6 parts-per-billion, respectively, with an averaging time of 100 s. The promising performance demonstrated a great potential of employing the reported sensor for high-sensitivity gas sensing in sub cubic centimeter-level spaces. Elsevier 2022-07-16 /pmc/articles/PMC9441259/ /pubmed/36068800 http://dx.doi.org/10.1016/j.pacs.2022.100386 Text en © 2022 The Authors https://creativecommons.org/licenses/by-nc-nd/4.0/This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/). |
spellingShingle | Research Article Wu, Guojie Gong, Zhenfeng Ma, Junsheng Li, Haie Guo, Min Chen, Ke Peng, Wei Yu, Qingxu Mei, Liang High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing |
title | High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing |
title_full | High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing |
title_fullStr | High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing |
title_full_unstemmed | High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing |
title_short | High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing |
title_sort | high-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing |
topic | Research Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9441259/ https://www.ncbi.nlm.nih.gov/pubmed/36068800 http://dx.doi.org/10.1016/j.pacs.2022.100386 |
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