Cargando…
High-sensitivity miniature dual-resonance photoacoustic sensor based on silicon cantilever beam for trace gas sensing
We report a miniature dual-resonance photoacoustic (PA) sensor, mainly consisting of a small resonant T-type PA cell and an integrated sensor probe based on a silicon cantilever beam. The resonance frequency of the miniature T-type PA cell is matched with the first-order natural frequency of the can...
| Autores principales: | , , , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Elsevier
2022
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9441259/ https://www.ncbi.nlm.nih.gov/pubmed/36068800 http://dx.doi.org/10.1016/j.pacs.2022.100386 |