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On-chip mid-infrared silicon-on-insulator waveguide methane sensor using two measurement schemes at 3.291 μm
Portable or even on-chip detection of methane (CH(4)) is significant for environmental protection and production safety. However, optical sensing systems are usually based on discrete optical elements, which makes them unsuitable for the occasions with high portability requirement. In this work, we...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Frontiers Media S.A.
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9445134/ https://www.ncbi.nlm.nih.gov/pubmed/36082199 http://dx.doi.org/10.3389/fchem.2022.953684 |