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On the Effect of the Co-Introduction of Al and Ga Impurities on the Electrical Performance of Transparent Conductive ZnO-Based Thin Films

In this study, a set of ZnO-based thin films were prepared on glass substrates at various substrate temperatures via the direct current magnetron sputtering of ceramic targets with the following compositions: pure ZnO, Al-doped ZnO with doping levels of 1 and 2 at.%, Ga-doped ZnO with doping levels...

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Detalles Bibliográficos
Autores principales: Asvarov, Abil S., Abduev, Aslan K., Akhmedov, Akhmed K., Kanevsky, Vladimir M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9457261/
https://www.ncbi.nlm.nih.gov/pubmed/36079251
http://dx.doi.org/10.3390/ma15175862