Anisotropic Strain Relaxation in Semipolar [Formula: see text] InGaN/GaN Superlattice Relaxed Templates

Semipolar (11 [Formula: see text] 2) InGaN/GaN superlattice templates with different periodical InGaN layer thicknesses were grown on m-plane sapphire substrates using metal-organic chemical vapor deposition (MOCVD). The strain in the superlattice layers, the relaxation mechanism and the influence o...

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Detalles Bibliográficos
Autores principales: Li, Wenlong, Wang, Lianshan, Chai, Ruohao, Wen, Ling, Wang, Zhen, Guo, Wangguo, Wang, Huanhua, Yang, Shaoyan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9458119/
https://www.ncbi.nlm.nih.gov/pubmed/36080045
http://dx.doi.org/10.3390/nano12173007

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9458119/
https://www.ncbi.nlm.nih.gov/pubmed/36080045
http://dx.doi.org/10.3390/nano12173007

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