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Piezoresistance Characterization of Silicon Nanowires in Uniaxial and Isostatic Pressure Variation
Silicon nanowires (SiNWs) are known to exhibit a large piezoresistance (PZR) effect, making them suitable for various sensing applications. Here, we report the results of a PZR investigation on randomly distributed and interconnected vertical silicon nanowire arrays as a pressure sensor. The samples...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9459738/ https://www.ncbi.nlm.nih.gov/pubmed/36080796 http://dx.doi.org/10.3390/s22176340 |