Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma

As the analysis of complicated reaction chemistry in bulk plasma has become more important, especially in plasma processing, quantifying radical density is now in focus. For this work, appearance potential mass spectrometry (APMS) is widely used; however, the original APMS can produce large errors d...

Descripción completa

Detalles Bibliográficos
Autores principales: Cho, Chulhee, Kim, Sijun, Lee, Youngseok, Jeong, Wonnyoung, Seong, Inho, Lee, Jangjae, Choi, Minsu, You, Yebin, Lee, Sangho, Lee, Jinho, You, Shinjae
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460062/
https://www.ncbi.nlm.nih.gov/pubmed/36081045
http://dx.doi.org/10.3390/s22176589

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460062/
https://www.ncbi.nlm.nih.gov/pubmed/36081045
http://dx.doi.org/10.3390/s22176589

Ejemplares similares