Cargando…

Refined Appearance Potential Mass Spectrometry for High Precision Radical Density Quantification in Plasma

As the analysis of complicated reaction chemistry in bulk plasma has become more important, especially in plasma processing, quantifying radical density is now in focus. For this work, appearance potential mass spectrometry (APMS) is widely used; however, the original APMS can produce large errors d...

Descripción completa

Detalles Bibliográficos
Autores principales:	Cho, Chulhee, Kim, Sijun, Lee, Youngseok, Jeong, Wonnyoung, Seong, Inho, Lee, Jangjae, Choi, Minsu, You, Yebin, Lee, Sangho, Lee, Jinho, You, Shinjae
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460062/ https://www.ncbi.nlm.nih.gov/pubmed/36081045 http://dx.doi.org/10.3390/s22176589

Ejemplares similares

Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma
por: Seong, Inho, et al.
Publicado: (2022)

Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath
por: Seong, Inho, et al.
Publicado: (2022)

Contribution of Ion Energy and Flux on High-Aspect Ratio SiO(2) Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C(4)F(8) Plasma: Individual Ion Energy and Flux Controlled
por: Jeong, Wonnyoung, et al.
Publicado: (2023)

Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method
por: Cho, Chulhee, et al.
Publicado: (2023)

Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma
por: Seong, Inho, et al.
Publicado: (2023)

Low-Temperature Plasma Diagnostics to Investigate the Process Window Shift in Plasma Etching of SiO(2)
por: Lee, Youngseok, et al.
Publicado: (2022)

Characterization of SiO(2) Plasma Etching with Perfluorocarbon (C(4)F(8) and C(6)F(6)) and Hydrofluorocarbon (CHF(3) and C(4)H(2)F(6)) Precursors for the Greenhouse Gas Emissions Reduction
por: Choi, Minsu, et al.
Publicado: (2023)

On the Quenching of Electron Temperature in Inductively Coupled Plasma
por: Seong, Inho, et al.
Publicado: (2023)

Characterization of SiO(2) Etching Profiles in Pulse-Modulated Capacitively Coupled Plasmas
por: Cho, Chulhee, et al.
Publicado: (2021)

Comprehensive Assessments in Bonding Energy of Plasma Assisted Si-SiO(2) Direct Wafer Bonding after Low Temperature Rapid Thermal Annealing
por: Lee, Youngseok, et al.
Publicado: (2022)

Database Development of SiO(2) Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe
por: Lee, Youngseok, et al.
Publicado: (2022)

Study on OH Radical Production Depending on the Pulse Characteristics in an Atmospheric-Pressure Nanosecond-Pulsed Plasma Jet
por: Seol, Youbin, et al.
Publicado: (2023)

Plasma Generator with Dielectric Rim and FSS Electrode for Enhanced RCS Reduction Effect
por: Oh, Taejoo, et al.
Publicado: (2021)

STAP Refinement of the NMR database: a database of 2405 refined solution NMR structures
por: Yang, Joshua SungWoo, et al.
Publicado: (2012)

Compensation of Heat Effect in Dielectric Barrier Discharge (DBD) Plasma System for Radar Cross-Section (RCS) Reduction
por: Jung, Jinwoo, et al.
Publicado: (2023)

Precise Characterization of Genetic Interactions in Cancer via Molecular Network Refining Processes
por: Jung, Jinmyung, et al.
Publicado: (2021)

Extending and refining the mass surface around $^{208}$Pb by high-precision Penning-trap mass spectrometry with ISOLTRAP
por: Beck, D, et al.
Publicado: (2011)

Quantification of Morpholine in Peel and Pulp of Apples and Oranges by Gas Chromatography−Mass Spectrometry
por: An, Kunho, et al.
Publicado: (2020)

Quantification of tear glucose levels and their correlation with blood glucose levels in dogs
por: Lee, Eunji, et al.
Publicado: (2022)

Three-dimensional label-free imaging and quantification of lipid droplets in live hepatocytes
por: Kim, Kyoohyun, et al.
Publicado: (2016)

Refined Quantification of Infection Bottlenecks and Pathogen Dissemination with STAMPR
por: Hullahalli, Karthik, et al.
Publicado: (2021)

Refinements of LC-MS/MS Spectral Counting Statistics Improve Quantification of Low Abundance Proteins
por: Lee, Ha Yun, et al.
Publicado: (2019)

Refining precision cancer therapy in ALK-positive NSCLC
por: Lin, Jessica J., et al.
Publicado: (2019)

Identification and Quantification of Glucosinolates in Kimchi by Liquid Chromatography-Electrospray Tandem Mass Spectrometry
por: Kim, Ho Jin, et al.
Publicado: (2017)

Three-Dimensional RNA Structure Refinement by Hydroxyl Radical Probing
por: Ding, Feng, et al.
Publicado: (2012)

Spectrometry provides precision for the masses
Publicado: (2001)

Simple and Precise Quantification of Iron Catalyst Content in Carbon Nanotubes Using UV/Visible Spectroscopy
por: Agustina, Elsye, et al.
Publicado: (2015)

A Derivative Method with Free Radical Oxidation to Predict Resveratrol Metabolites by Tandem Mass Spectrometry
por: Liu, Wangta, et al.
Publicado: (2015)

GalaxyRefineComplex: Refinement of protein-protein complex model structures driven by interface repacking
por: Heo, Lim, et al.
Publicado: (2016)

Accurate quantification of creatinine in serum by coupling a measurement standard to extractive electrospray ionization mass spectrometry
por: Huang, Keke, et al.
Publicado: (2016)

Diagnostic yield of multiparametric MRI for local recurrence at biochemical recurrence after radical prostatectomy
por: Kim, Minsu, et al.
Publicado: (2022)

Refined approach for quantification of in vivo ischemia-reperfusion injury in the mouse heart
por: Bohl, Steffen, et al.
Publicado: (2009)

Quality-by-Design: Multivariate Model for Multicomponent Quantification in Refining Process of Honey
por: Li, Xiaoying, et al.
Publicado: (2017)

Refining Clinical Quantification of Depth of Suppression in Amblyopia through Synoptophore Measurement
por: Plaumann, Maureen D., et al.
Publicado: (2023)

GalaxyRefine2: simultaneous refinement of inaccurate local regions and overall protein structure
por: Lee, Gyu Rie, et al.
Publicado: (2019)

Darier's Disease Appearing as Pityriasis Amiantacea
por: Yang, Min-Young, et al.
Publicado: (2018)

Unilateral Breast Edema: Spectrum of Etiologies and Imaging Appearances
por: Kwak, Jin Young, et al.
Publicado: (2005)

Development and Validation of Liquid Chromatography-Tandem Mass Spectrometry Method for Quantification of Plasma Metanephrines for Differential Diagnosis of Adrenal Incidentaloma
por: Lee, Sae-Mi, et al.
Publicado: (2015)

Contribution of Drosophila TRPA1-Expressing Neurons to Circadian Locomotor Activity Patterns
por: Lee, Youngseok
Publicado: (2013)

Computational refinement of post-translational modifications predicted from tandem mass spectrometry
por: Chung, Clement, et al.
Publicado: (2011)

Cannot write session to /tmp/vufind_sessions/sess_v8ol126ba9b8gjg683r9foa2bj