Affordable Open-Source Quartz Microbalance Platform for Measuring the Layer Thickness

The layer thickness measurement process is an indispensable companion of vacuum sputtering and evaporation. Thus, quartz crystal microbalance is a well-known and reliable method for monitoring film thickness. However, most commercial devices use very simple signal processing methods, offering only a...

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Detalles Bibliográficos
Autores principales: Matusiak, Adrian, Żak, Andrzej Marek
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460899/
https://www.ncbi.nlm.nih.gov/pubmed/36080879
http://dx.doi.org/10.3390/s22176422

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460899/
https://www.ncbi.nlm.nih.gov/pubmed/36080879
http://dx.doi.org/10.3390/s22176422

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