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Affordable Open-Source Quartz Microbalance Platform for Measuring the Layer Thickness
The layer thickness measurement process is an indispensable companion of vacuum sputtering and evaporation. Thus, quartz crystal microbalance is a well-known and reliable method for monitoring film thickness. However, most commercial devices use very simple signal processing methods, offering only a...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460899/ https://www.ncbi.nlm.nih.gov/pubmed/36080879 http://dx.doi.org/10.3390/s22176422 |