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Study of wide bandgap SnO(x) thin films grown by a reactive magnetron sputtering via a two-step method

In the present work, we report on the microstructural and optoelectronic properties of SnO(x) thin films deposited by a reactive radio frequency magnetron sputtering. After SnO(x) growth by sputtering under O(2)/Ar flow, we have used three different treatment methods, namely (1) as deposited films u...

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Detalles Bibliográficos
Autores principales: Zakaria, Y., Aïssa, B., Fix, T., Ahzi, S., Samara, A., Mansour, S., Slaoui, A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9468343/
https://www.ncbi.nlm.nih.gov/pubmed/36097272
http://dx.doi.org/10.1038/s41598-022-19270-w