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Study of wide bandgap SnO(x) thin films grown by a reactive magnetron sputtering via a two-step method
In the present work, we report on the microstructural and optoelectronic properties of SnO(x) thin films deposited by a reactive radio frequency magnetron sputtering. After SnO(x) growth by sputtering under O(2)/Ar flow, we have used three different treatment methods, namely (1) as deposited films u...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9468343/ https://www.ncbi.nlm.nih.gov/pubmed/36097272 http://dx.doi.org/10.1038/s41598-022-19270-w |