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Effects of precursor pre-treatment on the vapor deposition of WS(2) monolayers

Transition metal oxide powders have been widely used as the growth precursors for monolayer transition metal dichalcogenides (TMDCs) in chemical vapor deposition (CVD). It has been proposed that metal oxide precursors in the gas phase undergo a two-step reaction during CVD growth, where transition m...

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Detalles Bibliográficos
Autores principales: Pam, Mei Er, Shi, Yumeng, Hu, Junping, Zhao, Xiaoxu, Dan, Jiadong, Gong, Xue, Huang, Shaozhuan, Geng, Dechao, Pennycook, Stephen, Ang, Lay Kee, Yang, Hui Ying
Formato: Online Artículo Texto
Lenguaje:English
Publicado: RSC 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9473267/
https://www.ncbi.nlm.nih.gov/pubmed/36133195
http://dx.doi.org/10.1039/c8na00212f