Massively parallel direct writing of nanoapertures using multi-optical probes and super-resolution near-fields

Laser direct-writing enables micro and nanoscale patterning, and is thus widely used for cutting-edge research and industrial applications. Various nanolithography methods, such as near-field, plasmonic, and scanning-probe lithography, are gaining increasing attention because they enable fabrication...

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Detalles Bibliográficos
Autores principales: Park, Changsu, Hwang, Soobin, Kim, Donghyun, Won, Nahyun, Han, Runjia, Jeon, Seonghyeon, Shim, Wooyoung, Lim, Jiseok, Joo, Chulmin, Kang, Shinill
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9475023/
https://www.ncbi.nlm.nih.gov/pubmed/36119374
http://dx.doi.org/10.1038/s41378-022-00416-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9475023/
https://www.ncbi.nlm.nih.gov/pubmed/36119374
http://dx.doi.org/10.1038/s41378-022-00416-9

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