Cargando…
Massively parallel direct writing of nanoapertures using multi-optical probes and super-resolution near-fields
Laser direct-writing enables micro and nanoscale patterning, and is thus widely used for cutting-edge research and industrial applications. Various nanolithography methods, such as near-field, plasmonic, and scanning-probe lithography, are gaining increasing attention because they enable fabrication...
Autores principales: | , , , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9475023/ https://www.ncbi.nlm.nih.gov/pubmed/36119374 http://dx.doi.org/10.1038/s41378-022-00416-9 |