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Massively parallel direct writing of nanoapertures using multi-optical probes and super-resolution near-fields
Laser direct-writing enables micro and nanoscale patterning, and is thus widely used for cutting-edge research and industrial applications. Various nanolithography methods, such as near-field, plasmonic, and scanning-probe lithography, are gaining increasing attention because they enable fabrication...
| Autores principales: | , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9475023/ https://www.ncbi.nlm.nih.gov/pubmed/36119374 http://dx.doi.org/10.1038/s41378-022-00416-9 |