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A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes
This paper presents a micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes. Theoretical analyses and numerical simulations were conducted to model the angular accelerometer with key geometrical parameters (e.g., electrode spacing, via spacing and via s...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9475033/ https://www.ncbi.nlm.nih.gov/pubmed/36119376 http://dx.doi.org/10.1038/s41378-022-00418-7 |