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A micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes

This paper presents a micromachined electrochemical angular accelerometer with highly integrated sensitive microelectrodes. Theoretical analyses and numerical simulations were conducted to model the angular accelerometer with key geometrical parameters (e.g., electrode spacing, via spacing and via s...

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Detalles Bibliográficos
Autores principales:	Liang, Tian, Liu, Bowen, Chen, Mingwei, Lu, Yulan, Chen, Jian, Chen, Deyong, Wang, Junbo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9475033/ https://www.ncbi.nlm.nih.gov/pubmed/36119376 http://dx.doi.org/10.1038/s41378-022-00418-7

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