Micro 3D printing of a functional MEMS accelerometer

Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconductor manufacturing techniques. However, these...

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Detalles Bibliográficos
Autores principales: Pagliano, Simone, Marschner, David E., Maillard, Damien, Ehrmann, Nils, Stemme, Göran, Braun, Stefan, Villanueva, Luis Guillermo, Niklaus, Frank
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9482918/
https://www.ncbi.nlm.nih.gov/pubmed/36133693
http://dx.doi.org/10.1038/s41378-022-00440-9

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9482918/
https://www.ncbi.nlm.nih.gov/pubmed/36133693
http://dx.doi.org/10.1038/s41378-022-00440-9

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