The Impact of Manufacturing Imperfections on the Performance of Metalenses and a Manufacturing-Tolerant Design Method

Metalenses play an important role in optoelectronic integrated devices, given their advantages in miniaturization and integration. Due to its high aspect ratio subwavelength structure, fabricating metalenses requires a high-level dry etching technology. Consequently, structure deformation of the met...

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Detalles Bibliográficos
Autores principales: Zhu, Yicheng, Wang, Wenjuan, Yu, Feilong, Liu, Qingquan, Guo, Zilu, Li, Guanhai, Chen, Pingping, Lu, Wei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9501371/
https://www.ncbi.nlm.nih.gov/pubmed/36144155
http://dx.doi.org/10.3390/mi13091531

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9501371/
https://www.ncbi.nlm.nih.gov/pubmed/36144155
http://dx.doi.org/10.3390/mi13091531

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