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Development of MEMS Process Compatible (Bi,Sb)(2)(Se,Te)(3)-Based Thin Films for Scalable Fabrication of Planar Micro-Thermoelectric Generators

Bismuth telluride-based thin films have been investigated as the active material in flexible and micro thermoelectric generators (TEGs) for near room-temperature energy harvesting applications. The latter is a class of compact printed circuit board compatible devices conceptualized for operation at...

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Detalles Bibliográficos
Autores principales: Bhatnagar, Prithu, Vashaee, Daryoosh
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9501491/
https://www.ncbi.nlm.nih.gov/pubmed/36144082
http://dx.doi.org/10.3390/mi13091459