Optical Sensor, Based on an Accelerometer, for Low-Frequency Mechanical Vibrations

This article documents the design, manufacture, and testing of a silicon inertial optical sensor for low-frequency (lower than 2 kHz) applications. Three accelerometer designs optimized by parameterization using Finite Element Analysis were considered. The accelerometers were manufactured and the on...

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Detalles Bibliográficos
Autores principales: Sánchez-Fraga, Rodolfo, Tecpoyotl-Torres, Margarita, Mejía, Israel, Mañón, Jorge Omar, Riestra, Luis Eduardo, Alcantar-Peña, Jesús
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9502717/
https://www.ncbi.nlm.nih.gov/pubmed/36144085
http://dx.doi.org/10.3390/mi13091462

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9502717/
https://www.ncbi.nlm.nih.gov/pubmed/36144085
http://dx.doi.org/10.3390/mi13091462

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