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Optical Sensor, Based on an Accelerometer, for Low-Frequency Mechanical Vibrations
This article documents the design, manufacture, and testing of a silicon inertial optical sensor for low-frequency (lower than 2 kHz) applications. Three accelerometer designs optimized by parameterization using Finite Element Analysis were considered. The accelerometers were manufactured and the on...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9502717/ https://www.ncbi.nlm.nih.gov/pubmed/36144085 http://dx.doi.org/10.3390/mi13091462 |