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Ultra-High Sensitivity Ultrasonic Sensor with an Extrinsic All-Polymer Cavity

An ultra-high sensitivity ultrasonic sensor with an extrinsic all-polymer cavity is presented. The probe is constructed with a polymer ferrule and a polymer-based reflection diaphragm. A specially designed polymer cover is used to seal the cavity sensor head and apply pretension to the sensing diaph...

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Detalles Bibliográficos
Autores principales: Chen, Zongyu, Dong, Bo, Huang, Wobin, Yi, Yunji, Chan, Chichiu, Ruan, Shuangchen, Hou, Shaoyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9504150/
https://www.ncbi.nlm.nih.gov/pubmed/36146418
http://dx.doi.org/10.3390/s22187069