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Ultra-High Sensitivity Ultrasonic Sensor with an Extrinsic All-Polymer Cavity
An ultra-high sensitivity ultrasonic sensor with an extrinsic all-polymer cavity is presented. The probe is constructed with a polymer ferrule and a polymer-based reflection diaphragm. A specially designed polymer cover is used to seal the cavity sensor head and apply pretension to the sensing diaph...
Autores principales: | Chen, Zongyu, Dong, Bo, Huang, Wobin, Yi, Yunji, Chan, Chichiu, Ruan, Shuangchen, Hou, Shaoyu |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9504150/ https://www.ncbi.nlm.nih.gov/pubmed/36146418 http://dx.doi.org/10.3390/s22187069 |
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