Cargando…

High-Efficiency Copper Removal by Nitrogen Plasma-Assisted Picosecond Laser Processing

Copper (Cu) removal efficiency is a key parameter in the processing of Cu-based electronic devices. Herein, a nitrogen plasma-assisted picosecond (ps) laser process for Cu removal is presented. Based on the cleaning and activation effect of nitrogen plasma on the surface of Cu film in ps-laser ablat...

Descripción completa

Detalles Bibliográficos
Autores principales:	Li, Yunfan, Guo, Xuanqi, Wang, Shuai, Zhang, Shizhuo, Zhao, Yilin, Guo, Dingyi, Zhang, Chen, Liu, Sheng, Cheng, Gary J., Liu, Feng
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9504670/ https://www.ncbi.nlm.nih.gov/pubmed/36144115 http://dx.doi.org/10.3390/mi13091492

Ejemplares similares

Nanoscale-Precision Removal of Copper in Integrated Circuits Based on a Hybrid Process of Plasma Oxidation and Femtosecond Laser Ablation
por: Wang, Shuai, et al.
Publicado: (2021)

Efficient Picosecond Laser for Tattoo Removal in Rat Models
por: Qu, Yan, et al.
Publicado: (2020)

The Picosecond Laser Effects on Tattoo Removal and Metabolic Pathways
por: Qu, Yan, et al.
Publicado: (2021)

Picosecond lasers and applications
por: Goldberg, Lawrence S
Publicado: (1982)

Efficient Water-Assisted Glass Cutting with 355 nm Picosecond Laser Pulses
por: Markauskas, Edgaras, et al.
Publicado: (2022)

COMPACT PICOSECOND DIODE LASERS
por: Voropai, E. S., et al.
Publicado: (2022)

Influence of wavelength and accumulated fluence at picosecond laser-induced surface roughening of copper on secondary electron yield
por: Bez, Elena, et al.
Publicado: (2023)

Picosecond metrology of laser-driven proton bursts
por: Dromey, B., et al.
Publicado: (2016)

Enhanced Microsphere-Assisted Picosecond Laser Processing for Nanohole Fabrication on Silicon via Thin Gold Coating
por: Wen, Qiuling, et al.
Publicado: (2021)

The Efficiency of UV Picosecond Laser Processing in the Shaping of Surface Structures on Elastomers
por: Antoszewski, Bogdan, et al.
Publicado: (2020)

Id reaction and allergic contact dermatitis post-picosecond laser tattoo removal: A case report
por: Wong, Ian TY, et al.
Publicado: (2021)

Comparison of the efficacy and safety of picosecond Nd:YAG laser (1,064 nm), picosecond alexandrite laser (755 nm) and 2% hydroquinone cream in the treatment of melasma: A randomized, controlled, assessor-blinded trial
por: Liang, Surong, et al.
Publicado: (2023)

Precise Control of the Number of Layers of Graphene by Picosecond Laser Thinning
por: Lin, Zhe, et al.
Publicado: (2015)

Performance Evaluation and Comparison between Direct and Chemical-Assisted Picosecond Laser Micro-Trepanning of Single Crystalline Silicon
por: Zhu, Hao, et al.
Publicado: (2018)

Boosting laser-ion acceleration with multi-picosecond pulses
por: Yogo, A., et al.
Publicado: (2017)

Picosecond Pulsed Laser Deposition of Metals and Metal Oxides
por: Dikovska, Anna, et al.
Publicado: (2023)

A novel dual‐wavelength, Nd:YAG, picosecond‐domain laser safely and effectively removes multicolor tattoos
por: Bernstein, Eric F., et al.
Publicado: (2015)

Effects of picosecond laser on the multi-colored tattoo removal using Hartley guinea pig: A preliminary study
por: Choi, Mi Soo, et al.
Publicado: (2018)

Effective removal of solar lentigines by combination of pre– And post–fluorescent light energy treatment with picosecond laser treatment
por: Scarcella, Giuseppe, et al.
Publicado: (2020)

Multimillijoule coherent terahertz bursts from picosecond laser-irradiated metal foils
por: Liao, Guoqian, et al.
Publicado: (2019)

Ultrafast photoacoustic cavitation pumped by picosecond laser for high-efficient and long-term shockwave theranostics
por: Cui, Dandan, et al.
Publicado: (2023)

Effects of Electrolyte on Laser-Induced Periodic Surface Structures with Picosecond Laser Pulses
por: Kodama, Shuhei, et al.
Publicado: (2021)

A novel titanium sapphire picosecond‐domain laser safely and effectively removes purple, blue, and green tattoo inks
por: Bernstein, Eric F., et al.
Publicado: (2018)

Electron emission from metallic surfaces by picosecond laser pulses
por: Fry, A R, et al.
Publicado: (1994)

Relaxation Oscillation with Picosecond Spikes in a Conjugated Polymer Laser
por: Mujamammi, Wafa Musa, et al.
Publicado: (2016)

Dynamics of picosecond laser ablation for surgical treatment of colorectal cancer
por: Beck, R. J., et al.
Publicado: (2020)

Ultrafast cold-brewing of coffee by picosecond-pulsed laser extraction
por: Ziefuß, Anna R., et al.
Publicado: (2022)

An update on fractional picosecond laser treatment: histology and clinical applications
por: Zhou, Yanjun, et al.
Publicado: (2023)

A Pilot Split-Neck Case Study to Compare the Efficacy of the Long-Pulsed 755 nm Laser and the 532 nm Picosecond Laser for Acrochordon Removal
por: Park, Jong Heon, et al.
Publicado: (2023)

Extending Single Cell Bioprinting from Femtosecond to Picosecond Laser Pulse Durations
por: Zhang, Jun, et al.
Publicado: (2021)

Photoluminescence nonlinearity and picosecond transient absorption in an LYSO:Ce scintillator excited by a 266 nm ultraviolet laser
por: Wei, Kun, et al.
Publicado: (2021)

Picosecond photoconductivity
por: Hammond, Robert B
Publicado: (1986)

Picosecond diagnostics
por: Rossa, E
Publicado: (1995)

All-Solid-State Picosecond Laser System for Photocathode RF Gun
por: Sakai, F, et al.
Publicado: (1999)

Dendrimer-Capped Nanoparticles Prepared by Picosecond Laser Ablation in Liquid Environment
por: Giorgetti, Emilia, et al.
Publicado: (2009)

Mechanisms of picosecond laser-induced damage in common multilayer dielectric coatings
por: Kozlov, Alexei A., et al.
Publicado: (2019)

Repetition Rate Effects in Picosecond Laser Microprocessing of Aluminum and Steel in Water
por: Nicolae, Ionut, et al.
Publicado: (2017)

Novel treatment of calcifications from dermatomyositis with picosecond and carbon dioxide laser
por: Abrouk, Michael, et al.
Publicado: (2020)

Treatment of imipramine-induced hyperpigmentation with quality-switched ruby and picosecond lasers
por: Hamid, Ramiz Nayyer, et al.
Publicado: (2021)

Damage Inside Borosilicate Glass by a Single Picosecond Laser Pulse
por: Cheng, Weibo, et al.
Publicado: (2021)

Cannot write session to /tmp/vufind_sessions/sess_ilb1qdsp5v7ji0ibbkgsvgb20m