Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors

In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it...

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Detalles Bibliográficos
Autores principales: Tang, Bolun, Shi, Yunbo, Li, Jianwei, Tang, Jie, Feng, Qiaohua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506215/
https://www.ncbi.nlm.nih.gov/pubmed/36146128
http://dx.doi.org/10.3390/s22186778

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506215/
https://www.ncbi.nlm.nih.gov/pubmed/36146128
http://dx.doi.org/10.3390/s22186778

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