Cargando…
Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors
In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it...
Autores principales: | , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506215/ https://www.ncbi.nlm.nih.gov/pubmed/36146128 http://dx.doi.org/10.3390/s22186778 |
_version_ | 1784796667646574592 |
---|---|
author | Tang, Bolun Shi, Yunbo Li, Jianwei Tang, Jie Feng, Qiaohua |
author_facet | Tang, Bolun Shi, Yunbo Li, Jianwei Tang, Jie Feng, Qiaohua |
author_sort | Tang, Bolun |
collection | PubMed |
description | In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it at the correct operating temperature using a micro-hotplate robust to high temperatures. In this study, three hotplate designs were investigated: electrodes arranged on both sides of an AlN substrate, a micro-hotplate buried in an alumina ceramic substrate, and a beam structure formed using laser punching. The last two designs use magnetron-sputtered ultra-thin AlN films to separate the upper Au interdigital electrodes and lower Pt heating resistor in a sandwich-like structure. The temperature distribution is simulated by the Joule heat model, and the third design has better energy consumption performance. This design was fabricated, and the effect of the rough surface of the alumina ceramic on the preparation was addressed. The experimental results show that the micro-hotplate can operate at nearly 700 °C. The micro-hotplate heats to nearly 240 °C in 2.4 s using a power of ~340 mW. This design makes ceramic-based micro-hotplates a more practical alternative to silicon-based micro-hotplates in gas sensors. |
format | Online Article Text |
id | pubmed-9506215 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-95062152022-09-24 Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors Tang, Bolun Shi, Yunbo Li, Jianwei Tang, Jie Feng, Qiaohua Sensors (Basel) Article In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it at the correct operating temperature using a micro-hotplate robust to high temperatures. In this study, three hotplate designs were investigated: electrodes arranged on both sides of an AlN substrate, a micro-hotplate buried in an alumina ceramic substrate, and a beam structure formed using laser punching. The last two designs use magnetron-sputtered ultra-thin AlN films to separate the upper Au interdigital electrodes and lower Pt heating resistor in a sandwich-like structure. The temperature distribution is simulated by the Joule heat model, and the third design has better energy consumption performance. This design was fabricated, and the effect of the rough surface of the alumina ceramic on the preparation was addressed. The experimental results show that the micro-hotplate can operate at nearly 700 °C. The micro-hotplate heats to nearly 240 °C in 2.4 s using a power of ~340 mW. This design makes ceramic-based micro-hotplates a more practical alternative to silicon-based micro-hotplates in gas sensors. MDPI 2022-09-08 /pmc/articles/PMC9506215/ /pubmed/36146128 http://dx.doi.org/10.3390/s22186778 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Tang, Bolun Shi, Yunbo Li, Jianwei Tang, Jie Feng, Qiaohua Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors |
title | Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors |
title_full | Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors |
title_fullStr | Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors |
title_full_unstemmed | Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors |
title_short | Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors |
title_sort | design, simulation, and fabrication of multilayer al(2)o(3) ceramic micro-hotplates for high temperature gas sensors |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506215/ https://www.ncbi.nlm.nih.gov/pubmed/36146128 http://dx.doi.org/10.3390/s22186778 |
work_keys_str_mv | AT tangbolun designsimulationandfabricationofmultilayeral2o3ceramicmicrohotplatesforhightemperaturegassensors AT shiyunbo designsimulationandfabricationofmultilayeral2o3ceramicmicrohotplatesforhightemperaturegassensors AT lijianwei designsimulationandfabricationofmultilayeral2o3ceramicmicrohotplatesforhightemperaturegassensors AT tangjie designsimulationandfabricationofmultilayeral2o3ceramicmicrohotplatesforhightemperaturegassensors AT fengqiaohua designsimulationandfabricationofmultilayeral2o3ceramicmicrohotplatesforhightemperaturegassensors |