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Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors

In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it...

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Detalles Bibliográficos
Autores principales: Tang, Bolun, Shi, Yunbo, Li, Jianwei, Tang, Jie, Feng, Qiaohua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506215/
https://www.ncbi.nlm.nih.gov/pubmed/36146128
http://dx.doi.org/10.3390/s22186778
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author Tang, Bolun
Shi, Yunbo
Li, Jianwei
Tang, Jie
Feng, Qiaohua
author_facet Tang, Bolun
Shi, Yunbo
Li, Jianwei
Tang, Jie
Feng, Qiaohua
author_sort Tang, Bolun
collection PubMed
description In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it at the correct operating temperature using a micro-hotplate robust to high temperatures. In this study, three hotplate designs were investigated: electrodes arranged on both sides of an AlN substrate, a micro-hotplate buried in an alumina ceramic substrate, and a beam structure formed using laser punching. The last two designs use magnetron-sputtered ultra-thin AlN films to separate the upper Au interdigital electrodes and lower Pt heating resistor in a sandwich-like structure. The temperature distribution is simulated by the Joule heat model, and the third design has better energy consumption performance. This design was fabricated, and the effect of the rough surface of the alumina ceramic on the preparation was addressed. The experimental results show that the micro-hotplate can operate at nearly 700 °C. The micro-hotplate heats to nearly 240 °C in 2.4 s using a power of ~340 mW. This design makes ceramic-based micro-hotplates a more practical alternative to silicon-based micro-hotplates in gas sensors.
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spelling pubmed-95062152022-09-24 Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors Tang, Bolun Shi, Yunbo Li, Jianwei Tang, Jie Feng, Qiaohua Sensors (Basel) Article In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it at the correct operating temperature using a micro-hotplate robust to high temperatures. In this study, three hotplate designs were investigated: electrodes arranged on both sides of an AlN substrate, a micro-hotplate buried in an alumina ceramic substrate, and a beam structure formed using laser punching. The last two designs use magnetron-sputtered ultra-thin AlN films to separate the upper Au interdigital electrodes and lower Pt heating resistor in a sandwich-like structure. The temperature distribution is simulated by the Joule heat model, and the third design has better energy consumption performance. This design was fabricated, and the effect of the rough surface of the alumina ceramic on the preparation was addressed. The experimental results show that the micro-hotplate can operate at nearly 700 °C. The micro-hotplate heats to nearly 240 °C in 2.4 s using a power of ~340 mW. This design makes ceramic-based micro-hotplates a more practical alternative to silicon-based micro-hotplates in gas sensors. MDPI 2022-09-08 /pmc/articles/PMC9506215/ /pubmed/36146128 http://dx.doi.org/10.3390/s22186778 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Tang, Bolun
Shi, Yunbo
Li, Jianwei
Tang, Jie
Feng, Qiaohua
Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors
title Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors
title_full Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors
title_fullStr Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors
title_full_unstemmed Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors
title_short Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors
title_sort design, simulation, and fabrication of multilayer al(2)o(3) ceramic micro-hotplates for high temperature gas sensors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506215/
https://www.ncbi.nlm.nih.gov/pubmed/36146128
http://dx.doi.org/10.3390/s22186778
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