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Design, Simulation, and Fabrication of Multilayer Al(2)O(3) Ceramic Micro-Hotplates for High Temperature Gas Sensors
In gas sensors composed of semiconductor metal oxides and two-dimensional materials, the gas-sensitive material is deposited or coated on a metallic signal electrode and must be selective and responsive at a specific temperature. The microelectromechanical devices hosting this material must keep it...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506215/ https://www.ncbi.nlm.nih.gov/pubmed/36146128 http://dx.doi.org/10.3390/s22186778 |