A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation

This work pertains to the design of a cantilever-based piezoelectric MEMS device that is capable of generating arbitrary paths of its tip. The conceived device consists of a pair of rigidly coupled piezoelectric bimorph cantilevers, and a theoretical model is developed for the analytical evaluation...

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Detalles Bibliográficos
Autores principales: Botta, Fabio, Rossi, Andrea, Belfiore, Nicola Pio
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506270/
https://www.ncbi.nlm.nih.gov/pubmed/36144137
http://dx.doi.org/10.3390/mi13091514

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506270/
https://www.ncbi.nlm.nih.gov/pubmed/36144137
http://dx.doi.org/10.3390/mi13091514

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