Cargando…
A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation
This work pertains to the design of a cantilever-based piezoelectric MEMS device that is capable of generating arbitrary paths of its tip. The conceived device consists of a pair of rigidly coupled piezoelectric bimorph cantilevers, and a theoretical model is developed for the analytical evaluation...
| Autores principales: | , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506270/ https://www.ncbi.nlm.nih.gov/pubmed/36144137 http://dx.doi.org/10.3390/mi13091514 |