Self-aligned patterning technique for fabricating high-performance diamond sensor arrays with nanoscale precision

Efficient, nanoscale precision alignment of defect center creation in photonics structures in challenges the realization of high-performance photonic devices and quantum technology applications. Here, we propose a facile self-aligned patterning technique based on conventional engineering technology,...

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Detalles Bibliográficos
Autores principales: Wang, Mengqi, Sun, Haoyu, Ye, Xiangyu, Yu, Pei, Liu, Hangyu, Zhou, Jingwei, Wang, Pengfei, Shi, Fazhan, Wang, Ya, Du, Jiangfeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Association for the Advancement of Science 2022
Materias:
Physical and Materials Sciences
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506708/
https://www.ncbi.nlm.nih.gov/pubmed/36149948
http://dx.doi.org/10.1126/sciadv.abn9573

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506708/
https://www.ncbi.nlm.nih.gov/pubmed/36149948
http://dx.doi.org/10.1126/sciadv.abn9573

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