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Self-aligned patterning technique for fabricating high-performance diamond sensor arrays with nanoscale precision
Efficient, nanoscale precision alignment of defect center creation in photonics structures in challenges the realization of high-performance photonic devices and quantum technology applications. Here, we propose a facile self-aligned patterning technique based on conventional engineering technology,...
| Autores principales: | , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Association for the Advancement of Science
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9506708/ https://www.ncbi.nlm.nih.gov/pubmed/36149948 http://dx.doi.org/10.1126/sciadv.abn9573 |