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Atomistic reaction mechanism of CVD grown MoS(2) through MoO(3) and H(2)S precursors
Chemical vapor deposition (CVD) through sulfidation of MoO(3) is one of the most important synthesis techniques to obtain large-scale and high-quality two-dimensional (2D) MoS(2). Recently, H(2)S precursor is being used in the CVD technique to synthesize 2D MoS(2). Although several studies have been...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9515180/ https://www.ncbi.nlm.nih.gov/pubmed/36167969 http://dx.doi.org/10.1038/s41598-022-20531-x |