Cargando…
A voting-based ensemble feature network for semiconductor wafer defect classification
Semiconductor wafer defects severely affect product development. In order to reduce the occurrence of defects, it is necessary to identify why they occur, and it can be inferred by analyzing the patterns of defects. Automatic defect classification (ADC) is used to analyze large amounts of samples. A...
| Autores principales: | , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9519991/ https://www.ncbi.nlm.nih.gov/pubmed/36171470 http://dx.doi.org/10.1038/s41598-022-20630-9 |