Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces

Rigorously designed sub-micrometer structure arrays are widely used in metasurfaces for light modulation. One of the glaring restrictions is the unavailability of easily accessible fabrication methods to efficiently produce large-area and freely designed structure arrays with nanoscale resolution. W...

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Detalles Bibliográficos
Autores principales: Huang, Lingyu, Xu, Kang, Yuan, Dandan, Hu, Jin, Wang, Xinwei, Xu, Shaolin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9530239/
https://www.ncbi.nlm.nih.gov/pubmed/36192549
http://dx.doi.org/10.1038/s41467-022-33644-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9530239/
https://www.ncbi.nlm.nih.gov/pubmed/36192549
http://dx.doi.org/10.1038/s41467-022-33644-8

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