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Sub-wavelength patterned pulse laser lithography for efficient fabrication of large-area metasurfaces
Rigorously designed sub-micrometer structure arrays are widely used in metasurfaces for light modulation. One of the glaring restrictions is the unavailability of easily accessible fabrication methods to efficiently produce large-area and freely designed structure arrays with nanoscale resolution. W...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9530239/ https://www.ncbi.nlm.nih.gov/pubmed/36192549 http://dx.doi.org/10.1038/s41467-022-33644-8 |