Impact of Pt grain size on ferroelectric properties of zirconium hafnium oxide by chemical solution deposition

The effects of the grain size of Pt bottom electrodes on the ferroelectricity of hafnium zirconium oxide (HZO) were studied in terms of the orthorhombic phase transformation. HZO thin films were deposited by chemical solution deposition on the Pt bottom electrodes with various grain sizes which had...

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Detalles Bibliográficos
Autores principales: Nguyen, An Hoang-Thuy, Nguyen, Manh-Cuong, Nguyen, Anh-Duy, Yim, Ji-Yong, Kim, Jeong-Han, Park, No-Hwal, Jeon, Seung-Joon, Kwon, Daewoong, Choi, Rino
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer Nature Singapore 2022
Materias:
Full Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9535072/
https://www.ncbi.nlm.nih.gov/pubmed/36197530
http://dx.doi.org/10.1186/s40580-022-00334-6

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9535072/
https://www.ncbi.nlm.nih.gov/pubmed/36197530
http://dx.doi.org/10.1186/s40580-022-00334-6

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