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Impact of Pt grain size on ferroelectric properties of zirconium hafnium oxide by chemical solution deposition
The effects of the grain size of Pt bottom electrodes on the ferroelectricity of hafnium zirconium oxide (HZO) were studied in terms of the orthorhombic phase transformation. HZO thin films were deposited by chemical solution deposition on the Pt bottom electrodes with various grain sizes which had...
| Autores principales: | , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer Nature Singapore
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9535072/ https://www.ncbi.nlm.nih.gov/pubmed/36197530 http://dx.doi.org/10.1186/s40580-022-00334-6 |