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Process method of Si(3)N(4) ceramic brazing sealed cavity for high-temperature application
The process method of a Si(3)N(4) ceramic sealed cavity is realized by vacuum brazing and chemical reaction at 1,100°C and 0.5 MPa pressure. Through the combination of Si(3)N(4) ceramic polishing and thinning, inductively coupled plasma etching, and high-temperature metal filler (Ti-Zr-Cu-Ni) brazin...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Frontiers Media S.A.
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9551303/ https://www.ncbi.nlm.nih.gov/pubmed/36238103 http://dx.doi.org/10.3389/fchem.2022.1019822 |