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Deep-UV laser direct writing of photoluminescent ZnO submicron patterns: an example of nanoarchitectonics concept

Micro- and nanopatterning of metal oxide materials is an important process to develop electronic or optoelectronic devices. ZnO is a material of choice for its semiconducting and photoluminescence properties. In the frame of the nanoarchitectonics concept, we have developed and investigated a new pr...

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Detalles Bibliográficos
Autores principales: Kirscher, Quentin, Hajjar-Garreau, Samar, Grasset, Fabien, Berling, Dominique, Soppera, Olivier
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Taylor & Francis 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9553187/
https://www.ncbi.nlm.nih.gov/pubmed/36238440
http://dx.doi.org/10.1080/14686996.2022.2116294