A Novel p-Type ZnCo(x)O(y) Thin Film Grown by Atomic Layer Deposition

Reported herein is the atomic layer deposition (ALD) of novel ternary ZnCo(x)O(y) films possessing p-type semiconducting behavior. The preparation comprises of optimized ZnO and Co(3)O(4) deposition in sub-cycles using the commercially available precursors cyclopentadienylcobalt dicarbonyl (CpCo(CO)...

Descripción completa

Detalles Bibliográficos
Autores principales: Li, Leyi, Wan, Zhixin, Wen, Quan, Lv, Zesheng, Xi, Bin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9565241/
https://www.ncbi.nlm.nih.gov/pubmed/36234509
http://dx.doi.org/10.3390/nano12193381

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9565241/
https://www.ncbi.nlm.nih.gov/pubmed/36234509
http://dx.doi.org/10.3390/nano12193381

Ejemplares similares