Combining Azimuthal and Polar Angle Resolved Shadow Mask Deposition and Nanosphere Lithography to Uncover Unique Nano-Crystals

In this article, we present a systematic investigation on a multistep nanosphere lithography technique to uncover its potential in fabricating a wide range of two- and three-dimensional nanostructures. A tilted (polar angle) electron beam shower on a nanosphere mask results in an angled shadow mask...

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Detalles Bibliográficos
Autores principales: Ganguly, Arnab, Das, Gobind
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9565454/
https://www.ncbi.nlm.nih.gov/pubmed/36234592
http://dx.doi.org/10.3390/nano12193464

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9565454/
https://www.ncbi.nlm.nih.gov/pubmed/36234592
http://dx.doi.org/10.3390/nano12193464

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