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Influence of Annealing on the Dielectric Properties of Zn-SiO(2)/Si Nanocomposites Obtained in “Hot” Implantation Conditions
This paper presents the results of AC electrical measurements of Zn-SiO(2)/Si nanocomposites obtained by ion implantation. Implantation of Zn ions was carried out into thermally oxidized p-type silicon substrates with energy of 150 keV and fluence of 7.5 × 10(16) ion·cm(−2) at a temperature of 773 K...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9565583/ https://www.ncbi.nlm.nih.gov/pubmed/36234577 http://dx.doi.org/10.3390/nano12193449 |