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Influence of Annealing on the Dielectric Properties of Zn-SiO(2)/Si Nanocomposites Obtained in “Hot” Implantation Conditions

This paper presents the results of AC electrical measurements of Zn-SiO(2)/Si nanocomposites obtained by ion implantation. Implantation of Zn ions was carried out into thermally oxidized p-type silicon substrates with energy of 150 keV and fluence of 7.5 × 10(16) ion·cm(−2) at a temperature of 773 K...

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Detalles Bibliográficos
Autores principales:	Kołtunowicz, Tomasz N., Czarnacka, Karolina, Gałaszkiewicz, Piotr, Komarov, Fadei F., Makhavikou, Maxim A., Milchanin, Oleg V.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9565583/ https://www.ncbi.nlm.nih.gov/pubmed/36234577 http://dx.doi.org/10.3390/nano12193449

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