A Room Temperature ZnO-NPs/MEMS Ammonia Gas Sensor

This study uses ultrasonic grinding to grind ZnO powder to 10–20-nanometer nanoparticles (NPs), and these are integrated with a MEMS structure to form a ZnO-NPs/MEMS gas sensor. Measuring 1 ppm NH(3) gas and operating at room temperature, the sensor response for the ZnO-NPs/MEMS gas sensor is around...

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Detalles Bibliográficos
Autores principales: Hsueh, Ting-Jen, Ding, Ruei-Yan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9565766/
https://www.ncbi.nlm.nih.gov/pubmed/36234415
http://dx.doi.org/10.3390/nano12193287

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9565766/
https://www.ncbi.nlm.nih.gov/pubmed/36234415
http://dx.doi.org/10.3390/nano12193287

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