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A Room Temperature ZnO-NPs/MEMS Ammonia Gas Sensor

This study uses ultrasonic grinding to grind ZnO powder to 10–20-nanometer nanoparticles (NPs), and these are integrated with a MEMS structure to form a ZnO-NPs/MEMS gas sensor. Measuring 1 ppm NH(3) gas and operating at room temperature, the sensor response for the ZnO-NPs/MEMS gas sensor is around...

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Detalles Bibliográficos
Autores principales:	Hsueh, Ting-Jen, Ding, Ruei-Yan
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9565766/ https://www.ncbi.nlm.nih.gov/pubmed/36234415 http://dx.doi.org/10.3390/nano12193287

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