Effect of Drilling Parameters on Machining Performance in Drilling Polytetrafluoroethylene

Polytetrafluoroethylene (PTFE) plays an important role in semiconductor manufacturing. It is an important processing material for the key sealing components in the field of immersion lithography. The lack of research related to the mechanical processing of PTFE leads to many challenges in producing...

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Detalles Bibliográficos
Autores principales: Ni, Jing, Zeng, Xiaotian, Al-Furjan, M. S. H., Zhao, Huijun, Guan, Liming, Cui, Zhi, Han, Lidong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570827/
https://www.ncbi.nlm.nih.gov/pubmed/36234268
http://dx.doi.org/10.3390/ma15196922

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570827/
https://www.ncbi.nlm.nih.gov/pubmed/36234268
http://dx.doi.org/10.3390/ma15196922

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