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Effect of Drilling Parameters on Machining Performance in Drilling Polytetrafluoroethylene
Polytetrafluoroethylene (PTFE) plays an important role in semiconductor manufacturing. It is an important processing material for the key sealing components in the field of immersion lithography. The lack of research related to the mechanical processing of PTFE leads to many challenges in producing...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9570827/ https://www.ncbi.nlm.nih.gov/pubmed/36234268 http://dx.doi.org/10.3390/ma15196922 |