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Effects of Atomic Ratio on the Mechanical Properties of Amorphous Silicon Carbon Nitride
This paper evaluates the mechanical properties of amorphous silicon carbon nitride (a-SiC [Formula: see text] N [Formula: see text]) films with different atomic ratios via molecular dynamics simulation. The Si-C-N ternary amorphous model is constructed using ReaxFF potential and melt-quenching metho...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9572164/ https://www.ncbi.nlm.nih.gov/pubmed/36234206 http://dx.doi.org/10.3390/ma15196865 |